Deep UV LED Using Diamond
نویسندگان
چکیده
منابع مشابه
Diamond Photodetector Response to Deep Uv Excimer Laser Excitation
Diamond photoconductive detectors have previously been shown to be suitable for detection of deep ultraviolet nanosecond-scale pulses from excimer lasers, which are to be used in next generation lithographic systems. Using simple test circuitry and low bias voltages easily measurable responses were observed when these detectors were illuminated with laser pulses at typical laser fluence levels....
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ژورنال
عنوان ژورنال: Journal of the Illuminating Engineering Institute of Japan
سال: 2003
ISSN: 0019-2341,1349-838X,2185-1506
DOI: 10.2150/jieij1980.87.4_247